Reason Magazine 2014 Quartal 2 Seite 29

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Any contamination of the silicone substrate on the wafer would impede or inhibit the semiconducting ability of the wafer render ing it useless Unfortunately many of these plastics are easily ignited and readily burn giving off large amounts of dense black smoke Not only can a fire involving a plastic process tool quickly cause major damage to the tool but also the smoke can cause widespread contam ination to nearby tools and in process stock This could quickly escalate a small fire into an incident resulting in millions of dollars of physical damage and weeks of downtime In existing facilities where combustible tools are already present the installation of automatic fire protection within the tools can help prevent the spread of fire and dramati cally reduce the potential smoke generated until the tool can be replaced with a non combustible alternative There are a number of fire protection options for combustible tools and new technologies are continuing to be developed to help address tool owners concerns about rapid extinguishment of a fire within the tool limiting potential con tamination from the fire protection activat ing and quick reinstatement of the tool after an incident FM Global and FM Approvals are working with the manufacturer of a new water mist fire protection technology for the protection of SunEdison wet benches If the system is FM Approved this would address the fire hazard associated with combustible wet benches and help improve the risk at these facilities said Stephen Marek senior account engineer at FM Global who works with James Ingraham on improving the risk at SunEdison facilities An alternative to using common plas tics in process tool construction is to use plastics that have passed Approval Stan dard 4910 Cleanroom Materials Flam mability Test Protocol These materials have been evaluated for fire propagation behavior smoke contamination and con tamination by corrosive products and found to limit the fire spread and potential smoke damage if ignited Approval Standard 4910 can be found in the Approval Guide approvalguide com and is used by many semiconductor process tool manufacturers If the CVD tool involved in the fire incident at SK Hynix had used Approval Standard 4910 the fire may not have spread beyond the tool While it may not always be possible to purchase a process tool that does not include some combustible material FM Global Property Loss Prevention Data Sheet 7 7 Semiconductor Fabrication Facilities sug gests that limiting the combustible material within the tool to 1 lb ft 2 0 5 g m2 of the tool footprint will significantly reduce the risk of fire spread and contamination from smoke Similarly many semiconductor fab rication facilities have numerous existing process tools that would be cost prohibitive to replace Data Sheet 7 7 suggests implant ing a companywide tool replacement policy that specifies all new process tools purchased will use noncombustible or FM Approved materials A tool replacement policy can be a cost effective way of improving the risk at a semiconductor facility FM Global and FM Approvals are working with the manufacturer of a new water mist fire protection technology for the protection of SunEdison wet benches If the system is FM Approved this would address the fire hazard associated with combustible wet benches and help improve the risk at these facilities Stephen Marek SENIOR ACCOUNT ENGINEER ST LOUIS OPERATIONS AT FM GLOBAL ESTIMATED WAFER PRODUCTION SK Hynix in Wuxi China W A FE R P R O D U C TI O N 1 00 0 s pe r m on th DATE OF LOSS RECOVERY PERIOD 140 120 100 80 60 40 20 0 AUG13 SEPT13 OCT13 NOV13 DEC13 JAN14 FEB14 Production at the facility resumed in a limited capacity in October with full production in January 2014 Date of loss September 2013 theSCIENCE ISSUE 2 2014 Reason 29